The University of Maryland MRSEC grants ended in September 2013 after 17 years of successful operation. This site remains as a history of the center, but will not be actively maintained.

Shared Experimental Facilities (SEF)

Nanoelectronics Facility


This facility offers a suite of instruments for fabrication, as well as structural and electrical characterization of nanometer- to micrometer-scale devices under operational conditions. Devices may be characterized under ambient as well as controlled environmental conditions.

FEI XL-30 Scanning Electronic Microscope

Cascade 12000 Probe Station

Instrument Designations:

FEI XL-30 Scanning Electronic Microscope: Electron-beam lithography
Cascade 12000 Probe Station: Electron characterization
JEOL-4210 Scanning Probe Microscope: Controlled environment measurements;
Electrically-contacted samples
DI-Dimension 5100 SPM: Electrically contacted samples
DI Nanoscope III SPM: Ambient AFM/EFM/MFM measurements

Performance Features:

The FEI-XL-30 SEM is equipped with the Nanometer Pattern Generation System (NPGS) which allows arbitrary shapes to be directly patterned on a substrate with ~40 nanometer resolution.

The scanning probe microscopes allow a range of in situ electrical measurements to be performed on devices concurrent with electrostatic force and scanned-gate microscopy, in environments from ambient to high vacuum, and temperatures from 120 - 800K.

The Cascade Probe Station allows manual or automated probing of electrical devices in ambient environment or in inert gas, at temperatures from -55 - 200ºC


Kristen Burson

Nanoelectronics Facility Manager

(301) 405-6165

Xinghan "Harold" Cai

Nanoelectronics Facility Manager

(301) 405-8577

Contact Us | Page Last Updated: 09/19/12 | Site Map