Shared Experimental Facilities (SEF):

Scanning Electron Microscopy/Scanning Tunneling Microscopy/Atomic Force Microscopy Facility (UHV-SEM/STM/AFM)

Super-user: W. Cullen

Supervisors: Professor Ellen Williams

This ultrahigh vacuum facility consists of a scanning electron microscope, atomic force microscope, and scanning tunneling microscope combined in one state-of-the-art instrument (JEOL JSPM-4500A). This instrument allows for multi-scale microscopy at variable temperatures and proximal probe measurements of devices, growth structures and attendant fields. Control electronics are suitable for MFM/EFM measurements and provide scanning Kelvin probe force microscopy (SKPM) at sub-nanometer spatial resolution. Sample fabrication capabilities - ion gun, single and multimode effusion cells with collimation and spot positioning for in-situ deposition on the SPM stage - extend the scope of experiments.

This facility is operated cooperatively with the Department of Physics.

Contact

Dr. William Cullen

wcullen@physics.umd.edu

(301) 405-0076

© (2005) University of Maryland, College Park. All rights reserved. Permission to redistribute the contents without alteration is granted to educational institutions for non-profit administrative or educational purposes if proper credit is given to the University of Maryland, College Park as the source.

This material is based upon work supported by the National Science Foundation under the Materials Research Science and Engineering Centers program. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.