The University of Maryland MRSEC grants ended in September 2013 after 17 years of successful operation. This site remains as a history of the center, but will not be actively maintained.
University of Maryland
Materials Research Science and Engineering Center
Shared Experimental Facilities (SEF)
Nanoelectronics Facility
Overview:
This facility offers a suite of instruments for fabrication, as well as structural and electrical characterization of nanometer- to micrometer-scale devices under operational conditions. Devices may be characterized under ambient as well as controlled environmental conditions.
Instrument Designations:
| FEI XL-30 Scanning Electronic Microscope: | Electron-beam lithography |
|---|---|
| Cascade 12000 Probe Station: | Electron characterization |
| JEOL-4210 Scanning Probe Microscope: | Controlled environment measurements; Electrically-contacted samples |
| DI-Dimension 5100 SPM: | Electrically contacted samples |
| DI Nanoscope III SPM: | Ambient AFM/EFM/MFM measurements |
Performance Features:
The FEI-XL-30 SEM is equipped with the Nanometer Pattern Generation System (NPGS) which allows arbitrary shapes to be directly patterned on a substrate with ~40 nanometer resolution.
The scanning probe microscopes allow a range of in situ electrical measurements to be performed on devices concurrent with electrostatic force and scanned-gate microscopy, in environments from ambient to high vacuum, and temperatures from 120 - 800K.
The Cascade Probe Station allows manual or automated probing of electrical devices in ambient environment or in inert gas, at temperatures from -55 - 200ºC
Contact:
Contact Us | Page Last Updated: 09/19/12 | Site Map
